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Effect of deposition conditions on charging processes in SiNx: Application to RF-MEMS capacitive switches
Richard Daigler, Eleni Papandreou, Matroni Koutsoureli, George Papaioannou, John PapapolymerouVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.12.014
File:
PDF, 391 KB
english, 2009