Large area diffraction-based inspection of submicron...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Large area diffraction-based inspection of submicron periodic structures

Milan Držík, Alexander Šatka, Daniel Haško, Jaroslav Kováč, František Uherek, Duncan W.E. Allsopp, Steven J. Abbott, Graham Hubbard
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Volume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2008.12.041
File:
PDF, 686 KB
english, 2009
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