Fabrication and evaluation of 3D-electric micro filters...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Fabrication and evaluation of 3D-electric micro filters using proton beam writing

Yusuke Furuta, Hiroyuki Nishikawa, Takahiro Satoh, Yasuyuki Ishii, Tomihiro Kamiya, Ryota Nakao, Satoshi Uchida
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Volume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2008.12.065
File:
PDF, 1.02 MB
english, 2009
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