Negative UV–NIL (NUV–NIL) – A mix-and-match NIL and UV...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Negative UV–NIL (NUV–NIL) – A mix-and-match NIL and UV strategy for realisation of nano- and micrometre structures

Lars Henrik Dæhli Skjolding, Genis Turon Teixidor, Jenny Emnéus, Lars Montelius
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Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2008.12.077
File:
PDF, 214 KB
english, 2009
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