Precision micro-/nano-machining in a scanning electron microscope by run-to-run control based on image feedbacks
Lun-De Liao, Paul C.-P. Chao, Yu-Jhu Lin, Chi-Wei Chiu, Shaou-Gang Miaou, Ming Chang, Jeng-Sheng HuangVolume:
86
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2008.12.079
File:
PDF, 1.96 MB
english, 2009