Nanoimprinting using release-agent-coated resins

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Nanoimprinting using release-agent-coated resins

Makoto Okada, Masayuki Iwasa, Ken-ichiro Nakamatsu, Kazuhiro Kanda, Yuichi Haruyama, Shinji Matsui
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Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.01.002
File:
PDF, 360 KB
english, 2009
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