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Materials for double patterning strategies: Development and application
D. Perret, J. Simon, S. Gaugiran, C. Cutler, T. Cardolaccia, A. Pikon, I. Guerin, C. Lapeyre, S. Derrough, C. Szmanda, P. TrefonasVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.01.051
File:
PDF, 645 KB
english, 2009