Characterisation of FIB milling yield of metals by SEM...

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Characterisation of FIB milling yield of metals by SEM stereo imaging technique

H. Ostadi, K. Jiang, P.D. Prewett
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Volume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.01.056
File:
PDF, 570 KB
english, 2009
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