Sol–gel process to cast quartz glass microlens arrays

Microelectronic Engineering 2009 Vol. 86; Iss. 4-6

Sol–gel process to cast quartz glass microlens arrays

Thomas Kreuzberger, Alf Harnisch, Michael Helgert, Lars Erdmann, Robert Brunner
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Volume:
86
Year:
2009
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2009.01.071
File:
PDF, 365 KB
english, 2009
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