Frequency effects on the dielectric properties of AlN film...

Frequency effects on the dielectric properties of AlN film deposited by radio frequency reactive magnetron sputtering

Xiufeng Song, Renli Fu, Hong He
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Volume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.03.036
File:
PDF, 348 KB
english, 2009
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