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Thermal-flow techniques for sub-35 nm contact-hole fabrication using Taguchi method in electron-beam lithography
Te-Sheng Li, Szu-Hung Chen, Hsuen-Li ChenVolume:
86
Year:
2009
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2009.03.049
File:
PDF, 532 KB
english, 2009