Sputtered metal lift-off for grating fabrication on InP based optical devices
Liubov Magdenko, Fabien Gaucher, Abdel Aassime, Mathias Vanwolleghem, Philippe Lecoeur, Béatrice DagensVolume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.03.133
File:
PDF, 746 KB
english, 2009