Optical characteristics of Si/SiO2 multilayers prepared by...

Optical characteristics of Si/SiO2 multilayers prepared by magnetron sputtering

Hong Xiao, Shihua Huang, Jufang Zheng, Guanqun Xie, Yunlong Xie
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Volume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.04.014
File:
PDF, 391 KB
english, 2009
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