Optical characteristics of Si/SiO2 multilayers prepared by magnetron sputtering
Hong Xiao, Shihua Huang, Jufang Zheng, Guanqun Xie, Yunlong XieVolume:
86
Year:
2009
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.04.014
File:
PDF, 391 KB
english, 2009