Replication of high ordered nano-sphere array by...

Microelectronic Engineering 2009 Vol. 86; Iss. 12

Replication of high ordered nano-sphere array by nanoimprint lithography

Sung-Hoon Hong, Byeong-Ju Bae, Jae-Yeon Hwang, Seon-Yong Hwang, Heon Lee
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Volume:
86
Year:
2009
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2009.05.005
File:
PDF, 568 KB
english, 2009
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