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Design of a novel visual and control system for the prevention of the collision during the micro handling in a SEM chamber
Al. Cvetanovic, An. Cvetanovic, A. Deutschinger, I. Giouroudi, W. BrennerVolume:
87
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.06.031
File:
PDF, 1.07 MB
english, 2010