Synthesis, characterization of CeO2@SiO2 nanoparticles and their oxide CMP behavior
Xiaobing Zhao, Renwei Long, Yang Chen, Zhigang ChenVolume:
87
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2009.09.012
File:
PDF, 1.58 MB
english, 2010