Raman study of light-emitting SiNx films grown on Si by...

Thin Solid Films 2015 / 03 Vol. 579

Raman study of light-emitting SiNx films grown on Si by low-pressure chemical vapor deposition

Komarov, F., Vlasukova, L., Parkhomenko, I., Milchanin, O., Mudryi, A., Togambaeva, A., Korolik, O.
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
579
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2015.03.003
Date:
March, 2015
File:
PDF, 869 KB
english, 2015
Conversion to is in progress
Conversion to is failed