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Relationship between wafer edge design and its ultimate mechanical strength
Po-Ying Chen, Ming-Hsing Tsai, Wen-Kuan Yeh, Ming-Haw Jing, Yukon ChangVolume:
87
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2009.12.083
File:
PDF, 905 KB
english, 2010