E-beam lithography of computer generated holograms using a fully vectorial 3D beam propagation method
Raimondas Petruškevičius, Jonas Baltrusaitis, Darius Kezys, Marius Mikolajūnas, Viktoras Grigaliūnas, Darius ViržonisVolume:
87
Year:
2010
Language:
english
Pages:
6
DOI:
10.1016/j.mee.2010.04.001
File:
PDF, 1.60 MB
english, 2010