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Wideband frequency and in situ characterization of aluminum nitride (AlN) in a metal/insulator/metal (MIM) configuration
T. Bertaud, E. Defay, C. Bermond, T. Lacrevaz, J. Abergel, B. Salem, S. Capraro, B. FlechetVolume:
88
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2010.06.033
File:
PDF, 954 KB
english, 2011