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Fabrication and electrical performance of high-density arrays of nanometric silicon tips
Edson J. Carvalho, Marco A.R. Alves, Edmundo S. Braga, Lucila CescatoVolume:
87
Year:
2010
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2010.06.046
File:
PDF, 871 KB
english, 2010