Arrays of SU-8 microcantilevers with integrated piezoresistive sensors for parallel AFM applications
Andreas Schneider, Robert H. Ibbotson, Richard J. Dunn, Ejaz HuqVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.11.047
File:
PDF, 585 KB
english, 2011