Arrays of SU-8 microcantilevers with integrated...

Arrays of SU-8 microcantilevers with integrated piezoresistive sensors for parallel AFM applications

Andreas Schneider, Robert H. Ibbotson, Richard J. Dunn, Ejaz Huq
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.11.047
File:
PDF, 585 KB
english, 2011
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