Optimization of FIB milling for rapid NEMS prototyping

Microelectronic Engineering 2011 Vol. 88; Iss. 8

Optimization of FIB milling for rapid NEMS prototyping

Bjarke Malm, Dirch H. Petersen, Anders Lei, Timothy J. Booth, Lasse V. Homann, Peter Bøggild
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.11.049
File:
PDF, 593 KB
english, 2011
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