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Fabrication and characterization of SRN/SU-8 bimorph cantilevers for temperature sensing
Tom Larsen, Stephan Keller, Silvan Schmid, Søren Dohn, Anja BoisenVolume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2010.12.015
File:
PDF, 283 KB
english, 2011