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ECS Transactions [ECS China Semiconductor Technology International Conference 2011 (CSTIC 2011) - Shanghai, China (March 13 - March 14, 2011)] - Studying Photoresist Type for Sub-32nm Node Dense SRAM 2nd GT Layer
Xu, Yao, Hao, Jingan, Liu, Chang, Shi, Xuelong, Wu, Qiang, Gu, YimingYear:
2011
Language:
english
DOI:
10.1149/1.3567595
File:
PDF, 345 KB
english, 2011