Digital spectrometer-on-chip fabricated by step and repeat...

Microelectronic Engineering 2011 Vol. 88; Iss. 8

Digital spectrometer-on-chip fabricated by step and repeat nanoimprint lithography on pre-spin coated films

C. Peroz, S. Dhuey, A. Goltsov, M. Volger, B. Harteneck, I. Ivonin, A. Bugrov, S. Cabrini, S. Babin, V. Yankov
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.12.078
File:
PDF, 586 KB
english, 2011
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