Modeling and simulation of stamp deflections in nanoimprint lithography: Exploiting backside grooves to enhance residual layer thickness uniformity
Hayden Taylor, Kristian Smistrup, Duane BoningVolume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.12.090
File:
PDF, 463 KB
english, 2011