Spray coating of PMMA for pattern transfer via electron beam lithography on surfaces with high topography
J. Linden, Ch. Thanner, B. Schaaf, S. Wolff, B. Lägel, E. OesterschulzeVolume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2010.12.106
File:
PDF, 435 KB
english, 2011