Microcolumn with variable axis lens for large scan fields...

Microelectronic Engineering 2011 Vol. 88; Iss. 8

Microcolumn with variable axis lens for large scan fields and pixel numbers

H. Weigand, S. Gautsch, W. Strohmaier, M. Blideran, U. Staufer, N.F. de Rooij, D.P. Kern
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2010.12.120
File:
PDF, 845 KB
english, 2011
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