Flexible electronics: Prediction of substrate deformation...

Microelectronic Engineering 2011 Vol. 88; Iss. 6

Flexible electronics: Prediction of substrate deformation during different steps of the lithography process

Marco Barink, Dennis van den Berg, Iryna Yakimets, Peter Giesen, Johannes A.W. van Dommelen, Erwin Meinders
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Volume:
88
Year:
2011
Language:
english
Pages:
7
DOI:
10.1016/j.mee.2011.01.004
File:
PDF, 1.22 MB
english, 2011
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