Etching titanium nitride gate stacked on high-κ dielectric

Etching titanium nitride gate stacked on high-κ dielectric

J.C. Gerharz, K. Padmaraju, J. Moers, D. Grützmacher
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2011.02.049
File:
PDF, 533 KB
english, 2011
Conversion to is in progress
Conversion to is failed