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Etching titanium nitride gate stacked on high-κ dielectric
J.C. Gerharz, K. Padmaraju, J. Moers, D. GrützmacherVolume:
88
Year:
2011
Language:
english
Pages:
3
DOI:
10.1016/j.mee.2011.02.049
File:
PDF, 533 KB
english, 2011