An enhancement of via profile using MLR mask

Microelectronic Engineering 2011 Vol. 88; Iss. 8

An enhancement of via profile using MLR mask

Kang-Jin Kim, Jong-Jin Park, Sang-Hun Lee, Sung-Il Kim, Young-Wook Park, Chil-Gee Lee
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Volume:
88
Year:
2011
Language:
english
Pages:
4
DOI:
10.1016/j.mee.2011.02.057
File:
PDF, 619 KB
english, 2011
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