Seamless long line and space pattern fabrication for nanoimprint mold by using electron beam stepper
Makoto Okada, Takafumi Kishiro, Masashi Ataka, Norimichi Anazawa, Shinji MatsuiVolume:
88
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2011.02.105
File:
PDF, 903 KB
english, 2011