Seamless long line and space pattern fabrication for...

Seamless long line and space pattern fabrication for nanoimprint mold by using electron beam stepper

Makoto Okada, Takafumi Kishiro, Masashi Ataka, Norimichi Anazawa, Shinji Matsui
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Volume:
88
Year:
2011
Language:
english
Pages:
5
DOI:
10.1016/j.mee.2011.02.105
File:
PDF, 903 KB
english, 2011
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