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ECS Transactions [ECS 220th ECS Meeting - Boston, MA (October 9 - October 14, 2011)] - Effect of Plasma Treatment on Stress Reduction Induced by Shallow Trench Isolation Filled with Spin-on-Glass Dielectric
Hashiguchi, Hiroki, Nagata, Kohki, Sameshima, Takashi, Mizukami, Yuki, Ogura, Atsushi, Kuroda, Takeshi, Sato, Yoshihiro, Ishizuka, Syuuichi, Hirota, YoshihiroYear:
2011
Language:
english
DOI:
10.1149/1.3633034
File:
PDF, 205 KB
english, 2011