Placement of scattering bars in binary and attenuated phase shift mask for damascene trench patterning
Sohan Singh Mehta, Navab Singh, Moitreyee Mukherjee-Roy, Rakesh KumarVolume:
35
Year:
2004
Language:
english
Pages:
6
DOI:
10.1016/j.mejo.2003.10.008
File:
PDF, 581 KB
english, 2004