The local structural characterization of the inactive clusters in B, BF2 and BF3 implanted Si wafers using X-ray techniques
M. Alper Sahiner, Daniel F. Downey, Steven W. Novak, Joseph C. Woicik, Dario A. ArenaVolume:
36
Year:
2005
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2005.02.095
File:
PDF, 117 KB
english, 2005