Impact of the surface roughness on the electrical...

Microelectronics Journal 2006 Vol. 37; Iss. 8

Impact of the surface roughness on the electrical capacitance

A. Albina, P.L. Taberna, J.P. Cambronne, P. Simon, E. Flahaut, T. Lebey
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Volume:
37
Year:
2006
Language:
english
Pages:
7
DOI:
10.1016/j.mejo.2005.10.008
File:
PDF, 395 KB
english, 2006
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