Effects of substrate temperature on electrical and...

Microelectronics Journal 2006 Vol. 37; Iss. 9

Effects of substrate temperature on electrical and structural properties of copper thin films

Kah-Yoong Chan, Teck-Yong Tou, Bee-San Teo
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Volume:
37
Year:
2006
Language:
english
Pages:
8
DOI:
10.1016/j.mejo.2006.01.011
File:
PDF, 444 KB
english, 2006
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