Characterization and ellipsometric investigation of...

Microelectronics Journal 2006 Vol. 37; Iss. 10

Characterization and ellipsometric investigation of high-quality ZnO and ZnO(Ga2O3) thin alloys by reactive electron-beam co-evaporation technique

R. Al Asmar, J.-P. Atanas, Y. Zaatar, J. Podlecki, A. Foucaran
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Volume:
37
Year:
2006
Language:
english
Pages:
6
DOI:
10.1016/j.mejo.2006.03.005
File:
PDF, 201 KB
english, 2006
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