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Theoretical study of mechanical properties of multi-layer ULSI interconnect dielectrics by surface acoustic wave method
Xia Xiao, Xueyi You, Suying YaoVolume:
37
Year:
2006
Language:
english
Pages:
4
DOI:
10.1016/j.mejo.2006.04.005
File:
PDF, 147 KB
english, 2006