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Fabrication and characterization of stacked ZnO and ZnOGa2O3 layers for the realization of bulk acoustic wave resonated membranes
Y. Zaatar, R. Al Asmar, J. Podlecki, S. Youssef, M. Abdallah, N. Ouaini, A. FoucaranVolume:
38
Year:
2007
Language:
english
Pages:
9
DOI:
10.1016/j.mejo.2007.03.010
File:
PDF, 887 KB
english, 2007