A systematic dry etching process for profile control of...

Microelectronics Journal 2007 Vol. 38; Iss. 8-9

A systematic dry etching process for profile control of quantum dots and nanoconstrictions

Madnarski Sutikno, Uda Hashim, Zul Azhar Zahid Jamal
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
38
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2007.07.081
File:
PDF, 260 KB
english, 2007
Conversion to is in progress
Conversion to is failed