Electrical Characteristics of HfO[sub 2] Dielectrics with Ru Metal Gate Electrodes
Suh, You-Seok, Lazar, Heather, Chen, Bei, Lee, Jae-Hoon, Misra, VeenaVolume:
152
Year:
2005
Language:
english
Journal:
Journal of The Electrochemical Society
DOI:
10.1149/1.1992467
File:
PDF, 509 KB
english, 2005