Smooth indium zinc oxide film prepared by sputtering a...

Smooth indium zinc oxide film prepared by sputtering a In2O3:ZnO=95:5 target

Shang-Chou Chang, Ming-Hua Shiao
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Volume:
38
Year:
2007
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2007.09.014
File:
PDF, 198 KB
english, 2007
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