Effects of deposition pressure on the microstructural and...

Microelectronics Journal 2008 Vol. 39; Iss. 1

Effects of deposition pressure on the microstructural and optoelectrical properties of B-doped hydrogenated nanocrystalline silicon (nc-Si:H) thin films grown by hot-wire chemical vapor deposition

Peiqing Luo, Zhibin Zhou, Youjie Li, Shuquan Lin, Xiaoming Dou, Rongqiang Cui
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Volume:
39
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.mejo.2007.10.019
File:
PDF, 474 KB
english, 2008
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