Fabrication of a MEMS inertia switch on quartz substrate...

Microelectronics Journal 2008 Vol. 39; Iss. 9

Fabrication of a MEMS inertia switch on quartz substrate and evaluation of its threshold acceleration

Haogang Cai, Zhuoqing Yang, Guifu Ding, Xiaolin Zhao
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Volume:
39
Year:
2008
Language:
english
Pages:
8
DOI:
10.1016/j.mejo.2008.01.068
File:
PDF, 1.55 MB
english, 2008
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