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Charge-trapping properties of poly-silicon oxides by rapid thermal N2O process
Chyuan Haur Kao, C.S. Chen, C.H. LeeVolume:
39
Year:
2008
Language:
english
Pages:
5
DOI:
10.1016/j.mejo.2008.03.006
File:
PDF, 781 KB
english, 2008