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Investigation on LIGA-like process based on multilevel imprint lithography
Quandai Wang, Yugang Duan, Yucheng Ding, Bingheng Lu, Jiawei Xiang, Lianfa YangVolume:
40
Year:
2009
Language:
english
Pages:
7
DOI:
10.1016/j.mejo.2008.06.086
File:
PDF, 4.62 MB
english, 2009