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[ECS 210th ECS Meeting - Cancun, Mexico (October 29-November 3, 2006)] ECS Transactions - Effectiveness of Si Seed for Selective SiGe Epitaxial Deposition in Recessed Source and Drain for Locally Strained pMOS Application
Cheng, Po Lun, Liao, Chin I, Wu, Hou Ren, Chen, Yi Cheng, Chien, Chin Cheng, Yang, Chan Lon, Tzou, S F, Tang, Jinsong, Cho, Yonah, Sanchez, Errol, Chang, Vincent C, Fu, Tony, Hsu, Wen S.Volume:
3
Year:
2006
Language:
english
DOI:
10.1149/1.2355817
File:
PDF, 183 KB
english, 2006