Crystal-Originated Singularities on Si Wafer Surface after...

Japanese Journal of Applied Physics 1990 / 11 Vol. 29; Iss. Part 2, No

Crystal-Originated Singularities on Si Wafer Surface after SC1 Cleaning

Ryuta, Jiro, Morita, Etsuro, Tanaka, Toshiro, Shimanuki, Yasushi
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Volume:
29
Journal:
Japanese Journal of Applied Physics
DOI:
10.1143/JJAP.29.L1947
Date:
November, 1990
File:
PDF, 665 KB
1990
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